Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
نویسندگان
چکیده
منابع مشابه
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s150614745